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2026
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Lanjing Optoelectronics Starts Mass Supply of Short Wave Halogen Heating lamps, Empowering Precision Heating Processes for PV and Semiconductor PECVD & RTP Equipment
Author:
xiaolanjing
Recently, Linyi Lanjing Optoelectronic Technology Co., Ltd. has achieved stable mass production of transparent quartz halogen heating lamps and semi-gold-plated short-wave halogen heating lamps. Tailored for photovoltaic PECVD coating equipment and semiconductor RTP rapid thermal processing equipment, the products deliver stable and reliable infrared heat source solutions for silicon-wafer coating procedures, helping improve quality and efficiency for wafer thin-film deposition processes.
In the manufacturing flow of photovoltaic cells and semiconductor wafers, PECVD equipment generates passivation and anti-reflection functional thin films on silicon-wafer surfaces via reaction of process gases. RTP equipment performs rapid wafer heating and annealing treatment. The uniformity of thin-film thickness and film adhesion heavily rely on a stable and uniform substrate temperature field. Emitting short-wave infrared radiation, Lanjing Optoelectronics’ infrared heating lamps heat wafers to target process temperatures and ensure smooth coating reactions, serving as indispensable core heat-source components for complete equipment sets.
Both mass-produced models, the transparent halogen lamps and semi-gold-plated halogen lamps, adopt high-purity quartz substrates. For the semi-gold-plated variant, the single-side gold-plated reflective layer concentrates infrared energy directional to boost thermal-utilization efficiency. Adopting a short-wave infrared solution, the products maintain a stable peak wavelength within 1.0-1.4μm, matching the absorption band of silicon wafers. Featuring ultra-fast heating within 1-2 seconds, low thermal inertia and sensitive temperature-control response, they swiftly establish a uniform temperature field, reduce temperature deviation across individual wafers, guarantee consistent deposition of layers such as silicon nitride, and mitigate coating defects induced by temperature fluctuations.
Backed by mature manufacturing processes, Lanjing Optoelectronics has built standardized mass-delivery capacity. Validated under actual operating conditions, the products feature high consistency and operational stability, superior tube vacuum performance and qualified cleanliness, making them suitable for vacuum-chamber working conditions. They support both new-machine matching for coating and heat-treatment equipment manufacturers and spare-part replacement demands from end-user factories.
Against the backdrop of accelerating domestic substitution for photovoltaic and semiconductor equipment, demand for high-end heat-source components keeps rising steadily. Lanjing Optoelectronics will continue to deepen short-wave infrared heating technology research, provide customized tube solutions according to equipment manufacturers’ chamber structures and process temperature-zone requirements, and continuously optimize product quality, to deliver highly reliable infrared heating supporting options for China’s photovoltaic and semiconductor equipment industrial chain.
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